Semiconductor device and method for manufacturing the same

ABSTRACT

A semiconductor device is manufactured using a transistor in which an oxide semiconductor is included in a channel region and variation in electric characteristics due to a short-channel effect is less likely to be caused. The semiconductor device includes an oxide semiconductor film having a pair of oxynitride semiconductor regions including nitrogen and an oxide semiconductor region sandwiched between the pair of oxynitride semiconductor regions, a gate insulating film, and a gate electrode provided over the oxide semiconductor region with the gate insulating film positioned therebetween. Here, the pair of oxynitride semiconductor regions serves as a source region and a drain region of the transistor, and the oxide semiconductor region serves as the channel region of the transistor.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor device and a method formanufacturing the semiconductor device.

Note that in this specification, a semiconductor device refers to anydevice that can function by utilizing semiconductor characteristics, andan electro-optical device, a semiconductor circuit, and an electronicdevice are all semiconductor devices.

2. Description of the Related Art

A technique by which transistors are formed using semiconductor thinfilms formed over a substrate having an insulating surface has beenattracting attention. Such transistors are applied to a wide range ofelectronic devices such as an integrated circuit (IC) or an imagedisplay device (display device). As materials for semiconductor thinfilms applicable to the transistors, silicon-based semiconductormaterials have been widely used, but oxide semiconductors have beenattracting attention as alternative materials.

For example, a transistor whose active layer is formed using anamorphous oxide including indium (In), gallium (Ga), and zinc (Zn) andhaving an electron carrier density lower than 10¹⁸/cm³ is disclosed (seePatent Document 1).

Patent Document 2 discloses a technique in which in a staggeredtransistor including an oxide semiconductor, a highly conductive oxidesemiconductor including nitrogen is provided as buffer layers between asource region and a source electrode and between a drain region and adrain electrode, and thereby the contact resistance between the oxidesemiconductor and the source electrode and between the oxidesemiconductor and the drain electrode is reduced.

Non-Patent Document 1 discloses a top-gate oxide semiconductortransistor in which a channel region, a source region, and a drainregion are formed in a self-aligned process.

REFERENCE Patent Document

-   [Patent Document 1] Japanese Published Patent Application No.    2006-165528-   [Patent Document 2] Japanese Published Patent Application No.    2010-135774

Non-Patent Document

-   [Non-Patent Document 1] Jae Chul Park et al., “High performance    amorphous oxide thin film transistors with self-aligned top-gate    structure” IEDM2009, pp. 191-194

SUMMARY OF THE INVENTION

An object is to manufacture a semiconductor device using a transistor inwhich an oxide semiconductor is included in a channel region andvariation in electric characteristics due to a short-channel effect isless likely to be caused.

A semiconductor device according to one embodiment of the presentinvention includes an oxide semiconductor film having a pair ofoxynitride semiconductor regions including nitrogen and an oxidesemiconductor region sandwiched between the pair of oxynitridesemiconductor regions, a gate insulating film, and a gate electrodeprovided over the oxide semiconductor region with the gate insulatingfilm positioned therebetween.

Here, the pair of oxynitride semiconductor regions serves as a sourceregion and a drain region of a transistor, and the oxide semiconductorregion serves as a channel region of the transistor.

In the top-gate transistor, the source region and the drain region canbe formed by implanting ions including nitrogen into the oxidesemiconductor film with the use of the gate electrode as a mask. Thesource region and the drain region are formed using the gate electrodeas a mask, whereby the source region and the drain region do not overlapwith the gate electrode and thus parasitic capacitance can be reduced.

Since the parasitic capacitance can be reduced, the transistor canoperate at high speed.

Here, the nitrogen concentration of the oxynitride semiconductor regionsis higher than or equal to 0.01 at. % and lower than or equal to 30 at.%. The carrier density of the oxynitride semiconductor regions can beincreased by increasing the nitrogen concentration; however, when thenitrogen concentration is too high, transfer of carriers is inhibitedand the conductivity is decreased.

Note that ions including hydrogen may be implanted into the oxidesemiconductor film at the same time as the ions including nitrogen. Byimplanting hydrogen into the oxynitride semiconductor regions, thecarrier density can be increased as compared to the case of implantingonly nitrogen. That is, the conductivity can be increased even when theconcentration of implanted nitrogen is reduced. The hydrogenconcentration of the oxynitride semiconductor regions is higher than orequal to 1×10¹⁹ atoms/cm³ and lower than or equal to 1×10²² atoms/cm³.The carrier density can be increased by increasing the hydrogenconcentration; however, when the hydrogen concentration is too high,transfer of carriers is inhibited and the conductivity is decreased.

At this time, it is preferable to prevent hydrogen from being implantedinto the channel region through the source region and the drain regionof the oxide semiconductor film. If hydrogen is implanted into thechannel region of the oxide semiconductor film, a carrier path might beformed without application of gate voltage. That is, normally-oncharacteristics are exhibited. Specifically, the hydrogen concentrationof the channel region is lower than or equal to 1×10²⁰ atoms/cm³,preferably lower than or equal to 1×10¹⁹ atoms/cm³, further preferablylower than or equal to 1×10¹⁸ atoms/cm³.

The use of the oxynitride semiconductor regions as the source region andthe drain region has an effect in that a band edge of the channel whichis the oxide semiconductor region is hardly curved. On the other hand,in the case where the source region and the drain region are formedusing a metal material, a curve of the band edge of the channel which isthe oxide semiconductor region is not negligible, so that the effectivechannel length is decreased in some cases. This tendency becomes moreremarkable as the channel length of a transistor is reduced.

Moreover, the oxynitride semiconductor regions have a property ofoccluding hydrogen more easily than the oxide semiconductor region.Therefore, hydrogen taken into from the outside and hydrogen diffusingfrom the inside are occluded by the oxynitride semiconductor regionsserving as the source region and the drain region, whereby the hydrogenconcentration of the oxide semiconductor region serving as the channelregion can be reduced. That is, provision of the oxynitridesemiconductor regions as the source region and the drain region cansuppress deterioration of electric characteristics of the transistor dueto hydrogen and a reduction in reliability.

In addition, when the oxynitride semiconductor regions occlude hydrogen,nitrogen and hydrogen are bonded to each other, part thereof serves as adonor, and the carrier density is increased; consequently, theconductivity can be increased.

Note that it is confirmed that nitrogen in the oxynitride semiconductorregions does not diffuse into the oxide semiconductor region, which isdescribed later.

Further, formation of the oxynitride semiconductor regions as the sourceregion and the drain region enables a reduction in the contactresistance between the source and drain regions and wirings; thus, theon-state current of the transistor can be increased.

According to one embodiment of the present invention, a highly reliabletransistor which includes an oxide semiconductor and has favorableelectric characteristics can be manufactured.

BRIEF DESCRIPTION OF THE DRAWINGS

In the accompanying drawings:

FIGS. 1A to 1C are a top view and cross-sectional views which illustratean example of a transistor according to one embodiment of the presentinvention;

FIGS. 2A to 2C are cross-sectional views which illustrate an example ofa manufacturing process of a transistor according to one embodiment ofthe present invention;

FIGS. 3A to 3D are cross-sectional views which illustrate an example ofa manufacturing process of a transistor according to one embodiment ofthe present invention;

FIGS. 4A to 4D are cross-sectional views which illustrate an example ofa manufacturing process of a transistor according to one embodiment ofthe present invention;

FIGS. 5A to 5C illustrate band structures of an oxide semiconductor, anoxynitride semiconductor, and a metal material;

FIG. 6 shows diffusion of hydrogen in an oxide semiconductor and anoxynitride semiconductor;

FIG. 7 shows diffusion of nitrogen in an oxide semiconductor and anoxynitride semiconductor;

FIGS. 8A and 8B are a top view and a cross-sectional view whichillustrate an example of a display device including a transistoraccording to one embodiment of the present invention;

FIGS. 9A to 9D are perspective views which illustrate examples ofelectronic devices each including a transistor according to oneembodiment of the present invention; and

FIGS. 10A to 10E are cross-sectional views which illustrate examples oftransistors according to one embodiment of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

Hereinafter, embodiments and examples of the present invention will bedescribed in detail with reference to the accompanying drawings. Notethat the present invention is not limited to the description below, andit is easily understood by those skilled in the art that modes anddetails disclosed herein can be modified in various ways. Therefore, thepresent invention is not construed as being limited to description ofthe embodiments and examples. In describing structures of the presentinvention with reference to the drawings, the same reference numeralsare used in common for the same portions in different drawings. Notethat the same hatch pattern is applied to similar parts, and the similarparts are not especially denoted by reference numerals in some cases.

Note that the ordinal numbers such as “first” and “second” in thisspecification are used for convenience and do not denote the order ofsteps or the stacking order of layers. In addition, the ordinal numbersin this specification do not denote particular names which specify thepresent invention.

(Embodiment 1)

In this embodiment, an example of a top-gate transistor which includesan oxide semiconductor in a channel region and includes an oxynitridesemiconductor in a source region and a drain region that are provided inthe same layer as the channel region will be described with reference toFIGS. 1A to 1C.

FIGS. 1A to 1C are a top view and cross-sectional views of a top-gatetransistor. Here, FIG. 1A is a top view, FIG. 1B is a cross-sectionalview taken along A-B in FIG. 1A, and FIG. 1C is a cross-sectional viewtaken along C-D in FIG. 1A. Note that in FIG. 1A, some components of atransistor 151 (e.g., an interlayer insulating film 124) are omitted forbrevity.

The transistor 151 illustrated in FIGS. 1A to 1C includes an oxidesemiconductor film over an insulating surface, which includes an oxidesemiconductor region 126 and a pair of oxynitride semiconductor regions122; a gate insulating film 112 over the oxide semiconductor region 126;a gate electrode 114 over the gate insulating film 112; the interlayerinsulating film 124 which covers a base insulating film 102, the pair ofoxynitride semiconductor regions 122, and the gate electrode 114; andwirings 116 which are connected to the pair of oxynitride semiconductorregions 122 through contact holes 130 provided in the interlayerinsulating film 124. In this embodiment, the case where the baseinsulating film 102 is provided over a substrate 100 as the insulatingsurface is described.

Here, the pair of oxynitride semiconductor regions 122 serves as asource region and a drain region of the transistor 151, and the oxidesemiconductor region 126 serves as a channel region of the transistor151.

The oxide semiconductor film including the oxide semiconductor region126 and the pair of oxynitride semiconductor regions 122 may be formedusing a material including two or more of In, Ga, Sn, and Zn. Forexample, the oxide semiconductor region 126 is formed using anIn—Ga—Zn—O-based oxide semiconductor, and the pair of oxynitridesemiconductor regions 122 is formed using an In—Ga—Zn—O—N-basedoxynitride semiconductor.

The nitrogen concentration of the pair of oxynitride semiconductorregions 122 is higher than or equal to 0.01 at. % and lower than orequal to 30 at. %. Note that the nitrogen concentration can bequantified by secondary ion mass spectroscopy (SIMS), X-rayphotoelectron spectroscopy (XPS), or an electron probe X-raymicroanalyzer (EPMA).

Here, the hydrogen concentration of the pair of oxynitride semiconductorregions 122 is higher than or equal to 1×10¹⁹ atoms/cm³ and lower thanor equal to 1×10²² atoms/cm³. The hydrogen concentration of the oxidesemiconductor region 126 is lower than or equal to 1×10²⁰ atoms/cm³,preferably lower than or equal to 1×10¹⁹ atoms/cm³, further preferablylower than or equal to 1×10¹⁸ atoms/cm³. Note that the hydrogenconcentration can be quantified by SIMS.

The conductivity of the pair of oxynitride semiconductor regions 122 ishigher than or equal to 10 S/cm and lower than or equal to 1000 S/cm,preferably higher than or equal to 100 S/cm and lower than or equal to1000 S/cm. When the conductivity is lower than 10 S/cm, the on-statecurrent of the transistor is decreased. By setting the conductivity tobe lower than or equal to 1000 S/cm, an influence of an electric fieldapplied to the oxide semiconductor region 126 owing to an effect of thepair of oxynitride semiconductor regions 122 can be reduced and thus ashort-channel effect can be reduced.

There is no particular limitation on the substrate 100 as long as it hasheat resistance enough to withstand at least heat treatment performedlater. For example, a glass substrate, a ceramic substrate, a quartzsubstrate, or a sapphire substrate may be used as the substrate 100.Alternatively, a plastic substrate having sufficient heat resistance maybe used. Further alternatively, a single crystal semiconductor substrateor a polycrystalline semiconductor substrate made of silicon, siliconcarbide, or the like, a compound semiconductor substrate made of silicongermanium or the like, an SOI substrate, or the like may be used. Stillfurther alternatively, any of these substrates provided with asemiconductor element may be used as the substrate 100.

A flexible substrate may be used as the substrate 100. In the case wherea transistor is provided over the flexible substrate, the transistor maybe formed directly on the flexible substrate, or the transistor may beformed over a different substrate and then separated from the substrateto be transferred to the flexible substrate. In order to separate thetransistor from the substrate and transfer it to the flexible substrate,a separation layer is preferably provided between the differentsubstrate and the transistor.

The base insulating film 102 may be a single layer or a stacked layer ofany of a silicon oxide film, a silicon oxynitride film, a siliconnitride oxide film, and a silicon nitride film.

In this specification, silicon oxynitride refers to a substance thatincludes more oxygen than nitrogen and, for example, silicon oxynitrideincludes oxygen, nitrogen, silicon, and hydrogen at concentrationsranging from greater than or equal to 50 at. % and less than or equal to70 at. %, greater than or equal to 0.5 at. % and less than or equal to15 at. %, greater than or equal to 25 at. % and less than or equal to 35at. %, and greater than or equal to 0 at. % and less than or equal to 10at. %, respectively. Further, silicon nitride oxide refers to asubstance that includes more nitrogen than oxygen and, for example,silicon nitride oxide includes oxygen, nitrogen, silicon, and hydrogenat concentrations ranging from greater than or equal to 5 at. % and lessthan or equal to 30 at. %, greater than or equal to 20 at. % and lessthan or equal to 55 at. %, greater than or equal to 25 at. % and lessthan or equal to 35 at. %, and greater than or equal to 10 at. % andless than or equal to 25 at. %, respectively. Note that the above rangesare obtained by measurement using Rutherford backscattering spectrometry(RBS) or hydrogen forward scattering spectrometry (HFS). In addition,the total of the percentages of the constituent elements does not exceed100 at. %.

As the base insulating film 102, a film from which oxygen is released byheating may be used.

To release oxygen by heating means that the amount of released oxygenwhich is converted into oxygen atoms is greater than or equal to1.0×10¹⁸ atoms/cm³, preferably greater than or equal to 3.0×10²⁰atoms/cm³ in thermal desorption spectroscopy (TDS).

The amount of released oxygen is measured by TDS analysis at a substratetemperature higher than or equal to 150° C. and lower than or equal to700° C., preferably higher than or equal to 200° C. and lower than orequal to 650° C., further preferably higher than or equal to 250° C. andlower than or equal to 470° C. This is because, for example, it ispresumed that oxygen release at a substrate temperature lower than 150°C. is mainly caused by oxygen that is adsorbed to a substrate surfaceand has relatively low stability. When the substrate temperature is setto be lower than or equal to 700° C., the amount of released oxygen thatfits an actual manufacturing process of the transistor can be evaluated.

Here, a method by which the amount of released oxygen in the case ofbeing converted into oxygen atoms is measured using TDS analysis will bedescribed below.

The amount of released gas in TDS analysis is proportional to theintegral value of a spectrum. Therefore, the amount of released gas canbe calculated from the ratio of the integral value of a spectrum of aninsulating film to the reference value of a standard sample. Thereference value of a standard sample refers to the ratio of the densityof a predetermined atom included in a sample to the integral value of aspectrum.

For example, the number of the released oxygen molecules (N_(O2)) froman insulating film can be found according to an equation 1 with the TDSanalysis results of a silicon wafer including hydrogen at apredetermined density which is the standard sample and the TDS analysisresults of the insulating film. Here, all spectra having a mass numberof 32 which are obtained by the TDS analysis are assumed to originatefrom an oxygen molecule. CH₃OH, which is given as a gas having a massnumber of 32, is not taken into consideration on the assumption that itis unlikely to be present. Further, an oxygen molecule including anoxygen atom having a mass number of 17 or 18 which is an isotope of anoxygen atom is not taken into consideration either because theproportion of such a molecule in the natural world is minimal.N_(O2)=N_(H2)/S_(H2)×S_(O2)×α  (Equation 1)

N_(H2) is the value obtained by conversion of the number of hydrogenmolecules desorbed from the standard sample into density. S_(H2) is theintegral value of a spectrum when the standard sample is subjected toTDS analysis. Here, the reference value of the standard sample is set toN_(H2)/S_(H2). S_(O2) is the integral value of a spectrum when theinsulating film is subjected to TDS analysis. α is a coefficientaffecting the intensity of the spectrum in the TDS analysis. Refer toJapanese Published Patent Application No. H6-275697 for details of theequation 1. Note that the amount of released oxygen from the insulatingfilm is measured with a thermal desorption spectroscopy apparatusmanufactured by ESCO Ltd., EMD-WA1000S/W with the use of a silicon waferincluding hydrogen atoms at 1×10¹⁶ atoms/cm³ as the standard sample.

Further, in the TDS analysis, part of oxygen is detected as an oxygenatom. The ratio between oxygen molecules and oxygen atoms can becalculated from the ionization rate of the oxygen molecules. Note that,since the above a includes the ionization rate of the oxygen molecules,the number of the released oxygen atoms can also be estimated throughthe evaluation of the number of the released oxygen molecules.

Note that N_(O2) is the number of the released oxygen molecules. For theinsulating film, the amount of released oxygen in the case of beingconverted into oxygen atoms is twice the number of the released oxygenmolecules.

In the above structure, the insulating film from which oxygen isreleased by heating may be oxygen-excess silicon oxide (SiO_(X) (X>2)).In the oxygen-excess silicon oxide (SiO_(X) (X>2)), the number of oxygenatoms per unit volume is more than twice the number of silicon atoms perunit volume. The number of silicon atoms and the number of oxygen atomsper unit volume are measured by Rutherford backscattering spectrometry.

By supplying oxygen from the base insulating film to the oxidesemiconductor region, the interface state density between the baseinsulating film and the oxide semiconductor region can be reduced. As aresult, electric charge or the like which can be generated owing tooperation of the transistor or the like can be prevented from beingtrapped at the interface between the base insulating film and the oxidesemiconductor region; accordingly, a transistor having electriccharacteristics with little deterioration can be obtained.

Further, electric charge is generated owing to an oxygen vacancy in theoxide semiconductor in some cases. In general, when oxygen vacancies arecaused in an oxide semiconductor, part of the oxygen vacancies becomes adonor and generates an electron as a carrier. As a result, the thresholdvoltage of a transistor shifts in the negative direction. This occursremarkably in an oxygen vacancy caused on the backchannel side. Notethat a backchannel in this specification refers to the vicinity of aninterface of the oxide semiconductor region on the base insulating filmside. Oxygen is sufficiently released from the base insulating film tothe oxide semiconductor region, whereby oxygen vacancies in the oxidesemiconductor region which cause the negative shift of the thresholdvoltage can be reduced.

In other words, when an oxygen vacancy is caused in the oxidesemiconductor region, it is difficult to suppress trapping of electriccharge at the interface between the base insulating film and the oxidesemiconductor region. However, by providing an insulating film fromwhich oxygen is released by heating as the base insulating film, theinterface state density between the oxide semiconductor region and thebase insulating film and oxygen vacancies in the oxide semiconductorregion can be reduced and an influence of the trapping of electriccharge at the interface between the oxide semiconductor region and thebase insulating film can be made small.

The gate insulating film 112 may be formed to have a stacked-layerstructure or a single-layer structure using, for example, silicon oxide,silicon oxynitride, silicon nitride oxide, silicon nitride, aluminumoxide, hafnium oxide, or yttria-stabilized zirconia. For example, thegate insulating film 112 may be formed by a thermal oxidation method, aCVD method, or a sputtering method. As the gate insulating film 112, afilm from which oxygen is released by heating may be used. A film fromwhich oxygen is released by heating is used as the gate insulating film112, whereby oxygen vacancies caused in the oxide semiconductor region126 can be reduced and deterioration of electric characteristics of thetransistor can be suppressed.

In the structure described in this embodiment, the gate insulating film112 has no step portion; therefore, leakage current due to the gateinsulating film 112 can be reduced and withstand voltage of the gateinsulating film 112 can be increased. For that reason, the transistorcan operate normally even when the gate insulating film 112 has anextremely small thickness of approximately 5 nm. Note that a reductionin the thickness of the gate insulating film 112 has effects of reducinga short-channel effect and increasing the operation speed of thetransistor.

As a material for the gate electrode 114, a single metal, an alloy, or ametal nitride which includes at least one of aluminum, titanium,chromium, nickel, copper, yttrium, zirconium, molybdenum, silver,tantalum, and tungsten may be used. A transparent conductive materialincluding indium oxide, tin oxide, or zinc oxide may be used. The gateelectrode 114 may have a stacked-layer structure of any of the abovematerials.

The interlayer insulating film 124 may be formed to have a stacked-layerstructure or a single-layer structure using, for example, a materialsuch as silicon oxide, silicon oxynitride, silicon nitride oxide, orsilicon nitride. For example, the interlayer insulating film 124 may beformed by a thermal oxidation method, a CVD method, or a sputteringmethod. A silicon nitride film or a silicon nitride oxide film ispreferably used as the interlayer insulating film 124.

The wirings 116 may have a structure similar to that of the gateelectrode 114.

With such a structure, the transistor 151 has little parasiticcapacitance between the gate electrode 114 and the pair of oxynitridesemiconductor regions 122 and little variation in the threshold voltageeven when the channel length is reduced. Further, the contact resistancebetween the pair of oxynitride semiconductor regions 122 and the wirings116 is reduced, and thus the on-state current of the transistor can beincreased. Furthermore, the hydrogen concentration in the oxidesemiconductor region 126 is reduced, and thus the electriccharacteristics and reliability of the transistor can be improved.

Note that the gate insulating film 112 may be provided to cover theoxide semiconductor region 126 and the pair of oxynitride semiconductorregions 122 as illustrated in FIG. 4D.

This embodiment can be combined with any of the other embodiments asappropriate.

(Embodiment 2)

In this embodiment, examples of transistors which are different from thetransistor described in Embodiment 1 will be described with reference toFIGS. 10A to 10E.

A transistor 152 illustrated in FIG. 10A includes the substrate 100having an insulating surface; the gate electrode 114 over the substrate100; the gate insulating film 112 over the gate electrode 114; an oxidesemiconductor film which is provided over the gate electrode 114 withthe gate insulating film 112 positioned therebetween and includes theoxide semiconductor region 126 and the pair of oxynitride semiconductorregions 122; the interlayer insulating film 124 which covers the oxidesemiconductor film and the gate insulating film 112; and the wirings 116which are connected to the pair of oxynitride semiconductor regions 122through the contact holes 130 provided in the interlayer insulating film124. Note that the base insulating film 102 may be provided between thesubstrate 100 and the transistor 152.

A transistor 153 illustrated in FIG. 10B includes the substrate 100having an insulating surface; the gate electrode 114 over the substrate100; the gate insulating film 112 over the gate electrode 114; an oxidesemiconductor film which is provided over the gate electrode 114 withthe gate insulating film 112 positioned therebetween and includes theoxide semiconductor region 126 and the pair of oxynitride semiconductorregions 122; and the wirings 116 which are connected to the pair ofoxynitride semiconductor regions 122. Note that the base insulating film102 may be provided between the substrate 100 and the transistor 153.Although not illustrated, the interlayer insulating film 124 may beprovided over the transistor 153.

A transistor 154 illustrated in FIG. 10C includes the substrate 100having an insulating surface; the gate electrode 114 over the substrate100; the gate insulating film 112 over the gate electrode 114; thewirings 116 over the gate insulating film 112; and an oxidesemiconductor film which is provided over the gate electrode 114 withthe gate insulating film 112 positioned therebetween and includes theoxide semiconductor region 126 and the pair of oxynitride semiconductorregions 122 connected to the wirings 116. Note that the base insulatingfilm 102 may be provided between the substrate 100 and the transistor154. Although not illustrated, the interlayer insulating film 124 may beprovided over the transistor 154.

A transistor 155 illustrated in FIG. 10D includes the base insulatingfilm 102 over the substrate 100; an oxide semiconductor film over thebase insulating film, which includes the oxide semiconductor region 126and the pair of oxynitride semiconductor regions 122; the gateinsulating film 112 over the oxide semiconductor region 126; the gateelectrode 114 over the gate insulating film 112; and the wirings 116which are connected to the pair of oxynitride semiconductor regions 122.Although not illustrated, the interlayer insulating film 124 may beprovided over the transistor 155.

A transistor 156 illustrated in FIG. 10E includes the base insulatingfilm 102 over the substrate 100; the wirings 116 over the baseinsulating film; an oxide semiconductor film over the base insulatingfilm 102, which includes the oxide semiconductor region 126 and the pairof oxynitride semiconductor regions 122 connected to the wirings 116;the gate insulating film 112 over the oxide semiconductor region 126;and the gate electrode 114 over the gate insulating film 112. Althoughnot illustrated, the interlayer insulating film 124 may be provided overthe transistor 156.

The channel length of the transistor is determined by the intervalbetween the pair of oxynitride semiconductor regions 122 or the width ofthe gate electrode 114. The interval between the pair of oxynitridesemiconductor regions 122 is preferably equal to the width of the gateelectrode 114 because the pair of oxynitride semiconductor regions 122and the gate electrode 114 do not overlap with each other; however, theinterval between the pair of oxynitride semiconductor regions 122 doesnot need to be equal to the width of the gate electrode 114. Forexample, when the width of the gate electrode 114 is narrower than theinterval between the pair of oxynitride semiconductor regions 122, anoffset region is formed in a region where the gate electrode 114 doesnot overlap with the oxide semiconductor region; accordingly,concentration of electric fields is reduced, which leads to a reductionin a short-channel effect.

This embodiment can be combined with any of the other embodiments asappropriate.

(Embodiment 3)

In this embodiment, an example of a method for manufacturing thetransistor described in Embodiment 1 will be described.

First, the base insulating film 102 is formed over the substrate 100(see FIG. 2A). The base insulating film 102 may be formed by asputtering method, a CVD method, or the like.

In the case where the base insulating film is formed by a sputteringmethod, the base insulating film may be formed using a silicon target, aquartz target, an aluminum target, an aluminum oxide target, or the likeand a deposition gas including oxygen. The proportion of oxygen in thedeposition gas is 6 vol. % or more, preferably 50 vol. % or more, withrespect to the whole deposition gas. By increasing the proportion of theoxygen gas in the deposition gas, an insulating film from which oxygenis released by heating can be formed.

Hydrogen in the target is preferably removed as much as possible.Specifically, an oxide target including an OH group at 100 ppm or lower,preferably 10 ppm or lower, further preferably 1 ppm or lower is used,whereby the hydrogen concentration in the base insulating film 102 canbe reduced and thus the electric characteristics and reliability of thetransistor can be improved. For example, fused quartz is preferablebecause it is easily formed so as to include an OH group at 10 ppm orlower and is inexpensive. Needless to say, a target of synthetic quartzhaving a low OH group concentration may be used.

Next, an oxide semiconductor film is formed and then processed, so thatan island-shaped oxide semiconductor film 106 is formed (see FIG. 2B).Here, the base insulating film 102 and the oxide semiconductor film maybe successively formed in vacuum. For example, after impuritiesincluding hydrogen over the surface of the substrate 100 are removed byheat treatment or plasma treatment, the base insulating film 102 may beformed without exposure to the air, and the oxide semiconductor film maybe successively formed without exposure to the air. In this manner,impurities including hydrogen over the substrate surface can be reduced,and attachment of an atmospheric component to each interface can besuppressed; accordingly, a highly reliable transistor having favorableelectric characteristics can be manufactured. It is more effective toform the oxide semiconductor film in a heating atmosphere.

After formation of the oxide semiconductor film 106, first heattreatment may be performed. The first heat treatment is performed at atemperature higher than or equal to 150° C. and lower than or equal to650° C., preferably higher than or equal to 250° C. and lower than orequal to 450° C., in an oxidation atmosphere or an inert atmosphere.Here, the oxidation atmosphere refers to an atmosphere including anoxidation gas such as oxygen, ozone, or nitrogen oxide at 10 ppm orhigher. The inert atmosphere refers to an atmosphere which includes theoxidation gas at lower than 10 ppm and is filled with nitrogen or a raregas. The purity of the oxide semiconductor film 106 can be furtherincreased by the first heat treatment, and thus the electriccharacteristics and reliability of the transistor can be improved. Notethat the first heat treatment may be performed immediately afterformation of the oxide semiconductor film to be the oxide semiconductorfilm 106.

Next, a gate insulating film 108 and a conductive film 104 are formed tocover the oxide semiconductor film 106 (see FIG. 2C). Here, it ispreferable that the gate insulating film 108 and the conductive film 104be successively formed without exposure to the air.

Then, the conductive film 104 and the gate insulating film 108 areprocessed, so that the gate electrode 114 and the gate insulating film112 are formed. The gate insulating film 112 is formed directly underthe gate electrode 114 (see FIG. 3A). The gate electrode 114 may have atapered shape. Further, a structure in which the gate electrode 114 hasa smaller width so that the gate insulating film 112 extends beyond aregion where the gate electrode 114 is formed may be employed. When thegate insulating film 112 is provided to extend beyond the region wherethe gate electrode 114 is formed, regions where a smaller number of ionsare implanted (lightly doped drains (LDDs)) can be formed between achannel region and a source region and between the channel region and adrain region in ion implantation performed in a subsequent step. TheLDDs can suppress hot-carrier degradation or the like.

Next, ions 105 are implanted into the oxide semiconductor film 106 (seeFIG. 3B). The ions 105 are ions including nitrogen. The ions 105 may beimplanted by an ion doping method or an ion implantation method, forexample.

Alternatively, the ions 105 can include an ion including nitrogen and anion including hydrogen.

The ions 105 are implanted into a region which is not shielded by thegate electrode 114 and the gate insulating film 112. Thus, the oxidesemiconductor region 126 and the pair of oxynitride semiconductorregions 122 can be provided in the oxide semiconductor film (see FIG.3C).

In the formation of the oxynitride semiconductor regions, part ofnitrogen and part of hydrogen are bonded to each other and part of thebonded nitrogen and hydrogen generates carriers in some cases; thus, theoxynitride semiconductor regions have higher conductivity. This bondingbetween the oxynitride semiconductor regions and hydrogen is strongerthan bonding between the oxide semiconductor region and hydrogen.Therefore, hydrogen hardly diffuses into the oxide semiconductor region,and the reliability of the transistor can be improved as compared to thecase where the conductivity is increased by simply implanting hydrogeninto the oxide semiconductor film.

Next, the interlayer insulating film 124 is formed to cover the baseinsulating film 102, the pair of oxynitride semiconductor regions 122,and the gate electrode 114. The interlayer insulating film 124 may beformed using a material such as silicon oxide, silicon oxynitride,silicon nitride oxide, or silicon nitride by a sputtering method, a CVDmethod, or the like. At this time, it is preferable to use a materialfrom which oxygen is less likely to be released by heating. This is forprevention against a decrease in the conductivity of the pair ofoxynitride semiconductor regions 122. Specifically, the interlayerinsulating film 124 may be formed by a CVD method with the use of amixture which includes a silane gas as a main material and a propersource gas selected from a nitrogen oxide gas, a nitrogen gas, ahydrogen gas, and a rare gas. In addition, the substrate temperature maybe higher than or equal to 150° C. and lower than or equal to 600° C.,preferably higher than or equal to 300° C. and lower than or equal to550° C. By using a CVD method, the interlayer insulating film 124 fromwhich oxygen is less likely to be released by heating can be formed.Moreover, by using a silane gas as a main material, hydrogen remains inthe film and diffusion of the hydrogen occurs; accordingly, theconductivity of the pair of oxynitride semiconductor regions 122 can befurther increased. The hydrogen concentration in the interlayerinsulating film 124 may be higher than or equal to 0.1 at. % and lowerthan or equal to 25 at. %. Note that the hydrogen concentration can bequantified by SIMS, or RBS and HFS.

The interlayer insulating film 124 has the contact holes 130 reachingthe pair of oxynitride semiconductor regions 122. The wirings 116 areformed to be connected to the pair of oxynitride semiconductor regions122 through the contact holes 130. At this time, with the pair ofoxynitride semiconductor regions 122, the contact resistance with thewirings 116 can be reduced as compared to the case of an oxidesemiconductor film without the pair of oxynitride semiconductor regions122.

The wirings 116 may be formed using a material similar to that for thegate electrode 114.

Through the above steps, the transistor 151 can be manufactured (seeFIG. 3D).

Although the ions 105 are implanted after the gate insulating film 112is formed in this embodiment, one embodiment of the present invention isnot limited to this; the ions 105 may be implanted through the gateinsulating film 108 after the gate electrode 114 is formed, that is,before the gate insulating film 112 is formed. Regions to be the pair ofoxynitride semiconductor regions 122 are covered with the gateinsulating film 108, whereby damage to the pair of oxynitridesemiconductor regions 122 can be reduced. In this case, afterimplantation of the ions 105, the gate insulating film 108 may beprocessed using the gate electrode 114 as a mask to be the gateinsulating film 112.

In this manner, even when a transistor is miniaturized and the channellength is reduced, a highly reliable transistor which includes an oxidesemiconductor and has favorable electric characteristics can bemanufactured.

This embodiment can be combined with any of the other embodiments asappropriate.

(Embodiment 4)

In this embodiment, an example of a method for manufacturing thetransistor described in Embodiment 1, which is different from that inEmbodiment 3, will be described.

Steps up to and including the step in FIG. 2C are similar to those inEmbodiment 3.

After that, the conductive film 104 is processed, so that the gateelectrode 114 is formed (see FIG. 4A).

Next, the ions 105 are implanted through the gate insulating film 108(see FIG. 4B), so that the oxide semiconductor region 126 and the pairof oxynitride semiconductor regions 122 are formed (see FIG. 4C).

Then, the interlayer insulating film 124 and the contact holes 130 areformed. The contact holes 130 are also provided in the gate insulatingfilm 108.

Next, the wirings 116 are formed to be connected to the pair ofoxynitride semiconductor regions 122 through the contact holes 130.

Through the above steps, a transistor 157 can be manufactured (see FIG.4D).

Regions where the pair of oxynitride semiconductor regions 122 is formedare protected by the gate insulating film 108, whereby damage to thepair of oxynitride semiconductor regions 122 can be reduced. Moreover,since the gate insulating film 108 is also provided over the pair ofoxynitride semiconductor regions 122, generation of leakage currentbetween the gate electrode 114 and the pair of oxynitride semiconductorregions 122 can be suppressed.

This embodiment can be combined with any of the other embodiments asappropriate.

(Embodiment 5)

One mode of a display device including any of the transistorsexemplified in Embodiments 1 to 4 is illustrated in FIGS. 8A and 8B.

FIG. 8A is a top view of a panel. In the panel, a transistor 750 and aliquid crystal element 713 are sealed between a first substrate 701 anda second substrate 706 by a sealant 705. FIG. 8B is a cross-sectionalview taken along M-N in FIG. 8A.

The sealant 705 is provided so as to surround a pixel portion 702provided over the first substrate 701. The second substrate 706 isprovided over the pixel portion 702. Thus, the pixel portion 702 issealed together with a liquid crystal layer 708 by the first substrate701, the sealant 705, and the second substrate 706.

Further, an input terminal 720 is provided in a region that is differentfrom a region surrounded by the sealant 705 over the first substrate701, and flexible printed circuits (FPCs) 718 a and 718 b are connectedto the input terminal 720. The FPC 718 a is electrically connected to asignal line driver circuit 703 which is separately provided over anothersubstrate, and the FPC 718 b is electrically connected to a scan linedriver circuit 704 which is separately provided over another substrate.A variety of signals and potentials supplied to the pixel portion 702are supplied from the signal line driver circuit 703 and the scan linedriver circuit 704 through the FPC 718 a and the FPC 718 b.

Note that there is no particular limitation on a connection method of adriver circuit which is separately provided over another substrate, anda chip on glass (COG) method, a wire bonding method, a tape carrierpackage (TCP) method, a tape automated bonding (TAB) method, or the likecan be used.

As a display element provided in the display device, a liquid crystalelement (also referred to as a liquid crystal display element) can beused. Further, a display medium whose contrast is changed by an electriceffect, such as electronic ink, can be used.

The display device illustrated in FIGS. 8A and 8B includes an electrode715 and a wiring 716. The electrode 715 and the wiring 716 areelectrically connected to a terminal included in the FPC 718 a throughan anisotropic conductive film 719.

The electrode 715 is formed using the same conductive film as a firstelectrode 730. The wiring 716 is formed using the same conductive filmas a source electrode and a drain electrode of the transistor 750.

Note that the transistor 750 provided in the pixel portion 702 iselectrically connected to a display element to form a display panel. Avariety of display elements can be used as the display element as longas display can be performed.

An example of a display device using a liquid crystal element as adisplay element is illustrated in FIGS. 8A and 8B. In FIGS. 8A and 8B,the liquid crystal element 713 is a display element including the firstelectrode 730, a second electrode 731, and the liquid crystal layer 708.Note that an insulating film 732 and an insulating film 733 whichfunction as alignment films are provided so that the liquid crystallayer 708 is interposed therebetween. The second electrode 731 isprovided on the second substrate 706 side, and the first electrode 730and the second electrode 731 are stacked with the liquid crystal layer708 positioned therebetween.

Further, a spacer 735 is a columnar spacer formed of an insulating filmover the second substrate 706 in order to control the thickness (a cellgap) of the liquid crystal layer 708. Alternatively, a spherical spacermay be used.

In the case where a liquid crystal element is used as the displayelement, a thermotropic liquid crystal, a low-molecular liquid crystal,a high-molecular liquid crystal, a polymer dispersed liquid crystal, aferroelectric liquid crystal, an antiferroelectric liquid crystal, orthe like can be used. Such a liquid crystal material exhibits acholesteric phase, a smectic phase, a cubic phase, a chiral nematicphase, an isotropic phase, or the like depending on conditions.

Alternatively, a liquid crystal exhibiting a blue phase for which analignment film is unnecessary may be used for the liquid crystal layer708. A blue phase is one of liquid crystal phases, which appears justbefore a cholesteric phase changes into an isotropic phase while thetemperature of a cholesteric liquid crystal is increased. Since the bluephase appears only in a narrow temperature range, a liquid crystalcomposition in which a chiral agent is mixed is used for the liquidcrystal layer in order to improve the temperature range. The liquidcrystal composition which includes a liquid crystal exhibiting a bluephase and a chiral agent has a short response time of 1 millisecond orless and has optical isotropy, which makes the alignment processunneeded and viewing angle dependence small. In addition, since analignment film does not need to be provided and rubbing treatment isunnecessary, electrostatic discharge damage caused by the rubbingtreatment can be prevented and defects and damage of the liquid crystaldisplay device can be reduced in the manufacturing process. Thus,productivity of the liquid crystal display device can be improved.

The specific resistivity of the liquid crystal material is 1×10⁹ Ω·cm orhigher, preferably 1×10¹¹ Ω·cm or higher, further preferably 1×10¹² Ω·cmor higher. The value of the specific resistivity in this specificationis measured at 20° C.

The size of a storage capacitor provided in the liquid crystal displaydevice is set considering the leakage current of the transistor providedin the pixel portion or the like so that electric charge can be held fora predetermined period. By using a transistor including an oxidesemiconductor in a semiconductor film where a channel region is formed,it is enough to provide a storage capacitor having capacitance that is ⅓or less, preferably ⅕ or less of liquid crystal capacitance of eachpixel.

In the transistor which includes the oxide semiconductor film and isused in this embodiment, the hydrogen concentration in the channelregion that is an oxide semiconductor region can be reduced because asource region and a drain region that are oxynitride regions have aneffect of occluding hydrogen. Accordingly, the current in an off state(off-state current) can be reduced. Therefore, an electric signal suchas an image signal can be held for a longer period, and a writinginterval can be set longer in an on state. Accordingly, the frequency ofrefresh operation can be reduced, which leads to an effect ofsuppressing power consumption. Further, the transistor including theoxide semiconductor film can hold a potential supplied to a liquidcrystal element even when a capacitor is not specially provided or thecapacitance of a specially provided capacitor is extremely low.

In addition, the transistor which includes the oxide semiconductor filmand is used in this embodiment can have relatively high field-effectmobility and thus can operate at high speed. Therefore, by using thetransistor in a pixel portion of a liquid crystal display device, ahigh-quality image can be provided. In addition, since such transistorscan be separately provided in a driver circuit portion and a pixelportion over one substrate, the number of components of the liquidcrystal display device can be reduced.

For the liquid crystal display device, a twisted nematic (TN) mode, anin-plane-switching (IPS) mode, a fringe field switching (FFS) mode, anaxially symmetric aligned micro-cell (ASM) mode, an optical compensatedbirefringence (OCB) mode, a ferroelectric liquid crystal (FLC) mode, anantiferroelectric liquid crystal (AFLC) mode, or the like can be used.

A normally black liquid crystal display device such as a transmissiveliquid crystal display device utilizing a vertical alignment (VA) modemay be used. The vertical alignment mode is a method for controllingalignment of liquid crystal molecules of a liquid crystal display panel,in which liquid crystal molecules are aligned vertically to a panelsurface when no voltage is applied. Some examples can be given as thevertical alignment mode. For example, a multi-domain vertical alignment(MVA) mode, a patterned vertical alignment (PVA) mode, or an advancedsuper view (ASV) mode can be used. Moreover, it is possible to use amethod called domain multiplication or multi-domain design, in which apixel is divided into some regions (subpixels) and molecules are alignedin different directions in their respective regions.

In the liquid crystal display device, a black matrix (a light-blockinglayer); an optical member (an optical substrate) such as a polarizingmember, a retardation member, or an anti-reflection member; and the likeare provided as appropriate. For example, circular polarization may beemployed by using a polarizing substrate and a retardation substrate. Inaddition, a backlight, a side light, or the like may be used as a lightsource.

In addition, it is possible to employ a time-division display method (afield-sequential driving method) with the use of a plurality oflight-emitting diodes (LEDs) as a backlight. By employing afield-sequential driving method, color display can be performed withoutusing a color filter.

As a display method in the pixel portion, a progressive method, aninterlace method, or the like can be employed. Further, color elementscontrolled in a pixel at the time of color display are not limited tothree colors: R, G, and B (R, G, and B correspond to red, green, andblue, respectively). For example, R, G, B, and W (W corresponds towhite), or R, G, B, and one or more of yellow, cyan, magenta, and thelike can be used. Further, the sizes of display regions may differbetween respective dots of color elements. However, one embodiment ofthe present invention is not limited to a liquid crystal display devicefor color display and can be applied to a liquid crystal display devicefor monochrome display.

In FIGS. 8A and 8B, a flexible substrate as well as a glass substratecan be used as the first substrate 701 and the second substrate 706. Forexample, a plastic substrate having a light-transmitting property or thelike can be used. As plastic, a fiberglass-reinforced plastics (FRP)plate, a polyvinyl fluoride (PVF) film, a polyester film, or an acrylicresin film can be used. In addition, a sheet with a structure in whichan aluminum foil is sandwiched between PVF films or polyester films canbe used.

The liquid crystal display device performs display by transmitting lightfrom a light source or a display element. Therefore, the substrate andthe thin films such as the insulating film and the conductive filmprovided for the pixel portion where light is transmitted havelight-transmitting properties with respect to light in the visible-lightwavelength range.

The first electrode and the second electrode (each of which is alsoreferred to as a pixel electrode, a common electrode, a counterelectrode, or the like) for applying voltage to the display element mayhave light-transmitting properties or light-reflecting properties, whichdepends on the direction in which light is extracted, the position wherethe electrode is provided, and the pattern structure of the electrode.

The first electrode 730 and the second electrode 731 can be formed usinga light-transmitting conductive material such as indium oxide includingtungsten oxide, indium zinc oxide including tungsten oxide, indium oxideincluding titanium oxide, indium tin oxide including titanium oxide,indium tin oxide (also referred to as ITO), indium zinc oxide, or indiumtin oxide to which silicon oxide is added. Alternatively, a materialformed of one to ten graphene sheets may be used.

One of the first electrode 730 and the second electrode 731 can beformed using one or more kinds of materials selected from metals such astungsten (W), molybdenum (Mo), zirconium (Zr), hafnium (Hf), vanadium(V), niobium (Nb), tantalum (Ta), chromium (Cr), cobalt (Co), nickel(Ni), titanium (Ti), platinum (Pt), aluminum (Al), copper (Cu), andsilver (Ag); alloys of these metals; and nitrides of these metals.

The first electrode 730 and the second electrode 731 can be formed usinga conductive composition including a conductive macromolecule (alsoreferred to as a conductive polymer). As the conductive macromolecule, aso-called π-electron conjugated conductive macromolecule can be used.For example, polyaniline or a derivative thereof, polypyrrole or aderivative thereof, polythiophene or a derivative thereof, and acopolymer of two or more of aniline, pyrrole, and thiophene or aderivative thereof can be given.

Further, since a transistor is easily broken by static electricity orthe like, a protection circuit is preferably provided. The protectioncircuit is preferably formed using a nonlinear element.

As described above, by using any of the transistors exemplified inEmbodiments 1 to 4, a highly reliable liquid crystal display device canbe provided. Note that the transistors exemplified in Embodiments 1 to 4can be applied to not only semiconductor devices having the displayfunctions described above but also semiconductor devices having avariety of functions, such as a power device which is mounted on a powersupply circuit, a semiconductor integrated circuit such as LSI, and asemiconductor device having an image sensor function of readinginformation of an object.

This embodiment can be freely combined with any of the otherembodiments.

(Embodiment 6)

A semiconductor device which is one embodiment of the present inventioncan be applied to a variety of electronic devices (including gamemachines). Examples of electronic devices include a television device(also referred to as a television or a television receiver), a monitorof a computer or the like, a camera such as a digital camera or adigital video camera, a digital photo frame, a mobile phone (alsoreferred to as a cellular phone or a mobile phone device), a portablegame machine, a personal digital assistant, an audio reproducing device,and a large-sized game machine such as a pachinko machine. Examples ofelectronic devices each including the semiconductor device described inany of the above embodiments will be described.

FIG. 9A illustrates a laptop personal computer including a main body801, a housing 802, a display portion 803, a keyboard 804, and the like.By applying the semiconductor device described in any of Embodiments 1to 5, the laptop personal computer can have high reliability.

FIG. 9B illustrates a personal digital assistant (PDA) including adisplay portion 813, an operation button 814, and the like in a mainbody 811. A stylus 812 is provided as an accessory for operation. Byapplying the semiconductor device described in any of Embodiments 1 to5, the personal digital assistant (PDA) can have higher reliability.

FIG. 9C illustrates an example of an e-book reader. For example, ane-book reader 820 includes two housings, a housing 821 and a housing822. The housings 821 and 822 are combined with a hinge 825 so that thee-book reader 820 can be opened and closed using the hinge 825 as anaxis. With such a structure, the e-book reader 820 can operate like apaper book.

A display portion 823 and a display portion 824 are incorporated in thehousing 821 and the housing 822, respectively. The display portion 823and the display portion 824 may display one image or different images.In the case where the display portions display different images, forexample, the right display portion (the display portion 823 in FIG. 9C)can display text and the left display portion (the display portion 824in FIG. 9C) can display illustrations. By applying the semiconductordevice described in any of Embodiments 1 to 5, the e-book reader canhave high reliability.

Further, in FIG. 9C, the housing 821 is provided with an operationportion and the like. For example, the housing 821 is provided with apower switch 826, an operation key 827, a speaker 828, and the like.With the operation key 827, pages can be turned. Note that a keyboard, apointing device, or the like may also be provided on the surface of thehousing, on which the display portion is provided. Further, an externalconnection terminal (such as an earphone terminal or a USB terminal), arecording medium insertion portion, and the like may be provided on theback surface or the side surface of the housing. Furthermore, the e-bookreader 820 may have a function of an electronic dictionary.

The e-book reader 820 may send and receive data wirelessly. Throughwireless communication, desired book data or the like can be purchasedand downloaded from an electronic book server.

FIG. 9D illustrates an example of a television device. In a televisiondevice 860, a display portion 863 is incorporated in a housing 861. Thedisplay portion 863 can display images. Here, the housing 861 issupported by a stand 865. By applying the semiconductor device describedin any of Embodiments 1 to 5, the television device 860 can have highreliability.

The television device 860 can be operated by an operation switch of thehousing 861 or a separate remote controller. Further, the remotecontroller may be provided with a display portion for displaying dataoutput from the remote controller.

Note that the television device 860 is provided with a receiver, amodem, and the like. With the use of the receiver, general televisionbroadcasting can be received. Moreover, the television device isconnected to a communication network with or without wires via themodem, one-way (from a sender to a receiver) or two-way (between asender and a receiver or between receivers) data communication can beperformed.

The structure, the method, and the like described in this embodiment maybe combined with those described in the other embodiments asappropriate.

EXAMPLE 1

In this example, a specific example of an oxynitride semiconductor filmwhich was formed by a sputtering method with the use of an In—Ga—Zn—Otarget will be shown, and physical properties and a band diagram thereofwill be described.

Deposition conditions of Condition 1 are as follows.

-   Deposition method: a DC sputtering method-   Target: an In—Ga—Zn—O target (the atomic ratio is    In:Ga:Zn:O=1:1:1:4)-   Deposition power: 500 W-   Deposition gas: O₂, 40 sccm-   Deposition pressure: 0.4 Pa-   T-S distance: 60 mm-   Substrate temperature in deposition: 200° C.-   Film thickness: 100 nm

Deposition conditions of Condition 2 are as follows.

-   Deposition method: a DC sputtering method-   Target: an In—Ga—Zn—O target (the atomic ratio is    In:Ga:Zn:O=1:1:1:4)-   Deposition power: 500 W-   Deposition gas: N₂, 40 sccm-   Deposition pressure: 0.4 Pa-   T-S distance: 60 mm-   Substrate temperature in deposition: 200° C.-   Film thickness: 100 nm

Films of Condition 1 and Condition 2, which were each formed over aquartz substrate, are referred to as a sample 1 and a sample 2,respectively. Ultraviolet photoelectron spectroscopy (UPS) was performedon the sample 1 and the sample 2 to evaluate ionization potentials; theionization potential of the sample 1 was 7.8 eV and that of the sample 2was 7.6 eV.

Next, spectroscopic spectral data of the sample 1 and the sample 2 wasobtained with the use of a spectroscopic ellipsometer (UT-300manufactured by HORIBA Jobin Yvon), and the spectroscopic spectral datawas analyzed and an absorption coefficient α was derived.

Then, (αhν)^(1/2) and hν were plotted on the vertical axis and thehorizontal axis, respectively (Tauc plot), a tangent through a linearportion was drawn, and an intersection of the tangent and the horizontalaxis hν was employed as an optical bandgap. Here, h represents thePlanck constant, and ν represents the frequency of light.

The optical bandgaps of the sample 1 and the sample 2, which wereestimated in this manner, were 3.2 eV and 1.7 eV, respectively.

Here, a band structure in the case where an oxynitride semiconductor isused for a source and a drain and an oxide semiconductor is used for achannel will be described with reference to FIGS. 5A to 5C.

FIG. 5A shows a relation between a vacuum level Evac and levels of thesample 1, the sample 2, and a metal. Here, IP represents the ionizationpotential; Ea, the electron affinity; Eg, the energy gap; and Wf, thework function. In addition, Ec represents the conduction band minimum;Ev, the valence band maximum; and Ef, the Fermi level. As for a sign atthe end of each symbol, 1 denotes the sample 1, 2 denotes the sample 2,and m denotes the metal. Here, a metal having a work function of 4.8 eV(such as tungsten or molybdenum) is assumed as the metal.

Here, the sample 1 is an extremely purified semiconductor and thus hasextremely low carrier density; therefore, Ef_(—)1 is around the middlepoint between Ec and Ev. The sample 2 is an n-type semiconductor havinghigh carrier density, and thus Ec_(—)2 generally corresponds to Ef_(—)2.

Table 1 shows the ionization potentials, energy gaps, electronaffinities, and work functions of the sample 1, the sample 2, and themetal in that case. Note that a relation Wf_(—)1=Ea_(—)1+(½)·Eg_(—)1 anda relation Wf_(—)2=Ea_(—)2 are satisfied.

TABLE 1 IP [eV] Eg [eV] Ea [eV] Wf [eV] sample1 7.8 3.2 4.6 6.2 sample27.6 1.7 5.9 5.9 metal — — — 4.8

FIG. 5B shows a band structure in the case where a channel is connectedto a source and a drain as in the semiconductor device described inEmbodiment 1 of the present invention. That is, when the sample 1 thatis a channel is in contact with the sample 2 that is a source and adrain, carriers transfer so that the Fermi level becomes uniform andthus a band edge of the sample 1 is curved.

FIG. 5C shows, as a comparative example, a band structure in the casewhere the metal that is a source and a drain is in contact with thesample 1 that is a channel. Also in this case, carriers transfer so thatthe Fermi level becomes uniform and the band edge of the sample 1 iscurved; however, the band edge is curved significantly as compared tothe case where the sample 2 is in contact with the sample 1 because of arelation Wf_(—)2>Wf_m. Owing to such a large curve of the band, in thecase of reducing the channel length of a transistor for miniaturization,the rate at which the effective channel length is reduced is higher thanthe rate at which the channel length is actually reduced. In otherwords, a short-channel effect is enhanced and there is a possibility ofa shift of the threshold voltage of the transistor or an increase invariation in electric characteristics within a substrate surface. Thistendency is remarkable in the case where a material having a low workfunction is used for the source and the drain. In this example, a metalmaterial having a relatively high work function of 4.8 eV is assumed asthe metal; a metal material having a higher work function is rare orvery expensive, and thus is not practical.

Accordingly, it is found that when the sample 1 that is an oxidesemiconductor is used for a channel of a transistor and the sample 2that is an oxynitride semiconductor is used for a source and a drainthereof, a short-channel effect of the transistor can be reduced ascompared to the case where a metal material is used for the source andthe drain.

EXAMPLE 2

In this example, diffusion of hydrogen in an oxide semiconductor and anoxynitride semiconductor will be described with reference to FIG. 6.

A sample has the following structure.

An oxide semiconductor film 551 was formed over a glass substrate, anoxide semiconductor film 552 was formed over the oxide semiconductorfilm 551, and an oxynitride semiconductor film 553 was formed over theoxide semiconductor film 552.

Deposition conditions of the oxide semiconductor film 551 are asfollows.

-   Deposition method: a DC sputtering method-   Target: an In—Ga—Zn—O target (the atomic ratio is    In:Ga:Zn:O=2:2:1:7)-   Deposition power: 500 W-   Deposition gas: Ar, 40 sccm-   Deposition pressure: 0.4 Pa-   T-S distance: 60 mm-   Substrate temperature in deposition: RT-   Film thickness: 100 nm

Deposition conditions of the oxide semiconductor film 552 are asfollows.

-   Deposition method: a DC sputtering method-   Target: an In—Ga—Zn—O target (the atomic ratio is    In:Ga:Zn:O=2:2:1:7)-   Deposition power: 500 W-   Deposition gas: Ar, 30 sccm; O₂, 15 sccm-   Deposition pressure: 0.4 Pa-   T-S distance: 60 mm-   Substrate temperature in deposition: RT-   Film thickness: 100 nm

Deposition conditions of the oxynitride semiconductor film 553 are asfollows.

-   Deposition method: a DC sputtering method-   Target: an In—Ga—Zn—O target (the atomic ratio is    In:Ga:Zn:O=2:2:1:7)-   Deposition power: 500 W-   Deposition gas: Ar, 35 sccm; N₂, 5 sccm-   Deposition pressure: 0.4 Pa-   T-S distance: 60 mm-   Substrate temperature in deposition: RT-   Film thickness: 200 nm

SIMS was performed on the above sample before and after heat treatment,and the concentrations of hydrogen and nitrogen were evaluated. The heattreatment was performed with the use of a resistance heating furnace at350° C. for 1 hour in a nitrogen atmosphere.

FIG. 6 shows results of SIMS. The horizontal axis represents the depthof the sample, and the vertical axis represents the concentrations ofhydrogen and nitrogen. Note that the depth in SIMS in this specificationis an approximate value estimated from the etching rate of a siliconoxide film and does not always match an actual depth; therefore, thedepth in SIMS is used only as an indication. A thick dotted line 501represents the nitrogen concentration of the sample on which the heattreatment was not performed (as-depo); a thin dotted line 503, thehydrogen concentration of as-depo; a thick solid line 511, the nitrogenconcentration after the heat treatment; and a thin solid line 513, thehydrogen concentration after the heat treatment. Note that rangesindicated by three double-headed arrows respectively denote the oxidesemiconductor film 551, the oxide semiconductor film 552, and theoxynitride semiconductor film 553.

According to a comparison between the state of as-depo and the stateafter the heat treatment, the hydrogen concentration is decreased in theoxide semiconductor film 551 and the oxide semiconductor film 552 andincreased in the oxynitride semiconductor film 553. That is, the resultsindicate that hydrogen diffused from the oxide semiconductor film 551and the oxide semiconductor film 552 into the oxynitride semiconductorfilm 553.

Note that no difference was observed in the nitrogen concentration ineach layer between before and after the heat treatment.

Consequently, it was found that an oxynitride semiconductor easilyoccludes hydrogen and hardly releases hydrogen as compared to an oxidesemiconductor.

EXAMPLE 3

In this example, diffusion of nitrogen in an oxide semiconductor and anoxynitride semiconductor will be described with reference to FIG. 7.

A sample was obtained in the following manner: an oxynitridesemiconductor film 651 was formed over a glass substrate, and an oxidesemiconductor film 652 was formed over the oxynitride semiconductor film651.

Deposition conditions of the oxynitride semiconductor film 651 are asfollows.

-   Deposition method: a DC sputtering method-   Target: an In—Ga—Zn—O target (the atomic ratio is    In:Ga:Zn:O=1:1:1:4)-   Deposition power: 500 W-   Deposition gas: Ar, 35 sccm; N₂, 5 sccm-   Deposition pressure: 0.4 Pa-   T-S distance: 60 mm-   Substrate temperature in deposition: 200° C.-   Film thickness: 100 nm

Deposition conditions of the oxide semiconductor film 652 are asfollows.

-   Deposition method: a DC sputtering method-   Target: an In—Ga—Zn—O target (the atomic ratio is    In:Ga:Zn:O=1:1:1:4)-   Deposition power: 500 W-   Deposition gas: Ar, 30 sccm; O₂, 15 sccm-   Deposition pressure: 0.4 Pa-   T-S distance: 60 mm-   Substrate temperature in deposition: 200° C.-   Film thickness: 200 nm

SIMS was performed on the above sample before and after heat treatment,and the nitrogen concentration was evaluated. The heat treatment wasperformed with the use of a resistance heating furnace at 450° C. or650° C. for 1 hour in a nitrogen atmosphere.

FIG. 7 shows results of SIMS. A solid line 601 represents the nitrogenconcentration of the sample on which the heat treatment or the like wasnot performed (as-depo); a solid line 611, the nitrogen concentration ofthe sample after the heat treatment at 450° C.; and a solid line 621,the nitrogen concentration of the sample after the heat treatment at650° C. Note that ranges indicated by double-headed arrows respectivelydenote the oxynitride semiconductor film 651 and the oxide semiconductorfilm 652.

From a comparison between the sample of as-depo and the sample after theheat treatment at 450° C., it is found that the heat treatment at 450°C. hardly causes diffusion of nitrogen from the oxynitride semiconductorfilm 651 into the oxide semiconductor film 652. On the other hand, froma comparison between the sample of as-depo and the sample after the heattreatment at 650° C., it is found that the heat treatment at 650° C.causes slight diffusion of nitrogen from the oxynitride semiconductorfilm 651 into the oxide semiconductor film 652.

According to this example, it was found that nitrogen hardly diffusesfrom an oxynitride semiconductor into an oxide semiconductor in aprocess at 450° C. or lower and nitrogen slightly diffuses at 650° C.

In other words, an oxynitride semiconductor is extremely stable, anddiffusion of nitrogen due to heat treatment or the like is less likelyto occur.

This application is based on Japanese Patent Application serial no.2010-252489 filed with the Japan Patent Office on Nov. 11, 2010, theentire contents of which are hereby incorporated by reference.

What is claimed is:
 1. A method for manufacturing a semiconductordevice, comprising the steps of: forming an oxide semiconductor filmover an insulating surface over a substrate; forming a gate insulatingfilm over the oxide semiconductor film; forming a gate electrode overthe gate insulating film; forming a pair of oxynitride semiconductorregions by implanting an ion including nitrogen into the oxidesemiconductor film with the gate electrode used as a mask; forming awiring connected to one of the pair of oxynitride semiconductor regions;and heating the substrate with a substrate temperature higher than orequal to 150 ° C. and lower than or equal to 600 ° C. after forming thepair of oxynitride semiconductor regions.
 2. The method formanufacturing a semiconductor device according to claim 1, wherein theion including nitrogen is implanted so that a nitrogen concentration ofthe pair of oxynitride semiconductor regions is higher than or equal to0.01 at. % and lower than or equal to 30 at. %.
 3. The method formanufacturing a semiconductor device according to claim 1, wherein theoxide semiconductor film is formed so that a hydrogen concentration ofthe pair of oxynitride semiconductor regions is higher than or equal to1 ×10¹⁹ atoms/cm³ and lower than or equal to 1×10²² atoms/cm³, and sothat a hydrogen concentration of a region sandwiched between the pair ofoxynitride semiconductor regions is lower than or equal to 1×10²⁰atoms/cm³.
 4. The method for manufacturing a semiconductor deviceaccording to claim 1, wherein the oxide semiconductor film is providedto comprise two or more of In, Ga, Sn, and Zn.
 5. The method formanufacturing a semiconductor device according to claim 1, whereinoxygen is released from at least one of an insulating film having theinsulating surface and the gate insulating film by heating.
 6. Themethod for manufacturing a semiconductor device according to claim 1,further comprising the step of forming an insulating film over the gateelectrode, wherein the heating step is performed during the step offorming the insulating film.
 7. The method for manufacturing asemiconductor device according to claim 1, wherein ions includingnitrogen and hydrogen are implanted into the oxide semiconductor film inthe step of forming the pair of oxynitride semiconductor regions.
 8. Amethod for manufacturing a semiconductor device, comprising the stepsof: forming an oxide semiconductor film over an insulating surface overa substrate; forming a gate insulating film covering the oxidesemiconductor film; forming a conductive film over the gate insulatingfilm; forming a gate electrode by processing the conductive film;forming a pair of oxynitride semiconductor regions in a region of theoxide semiconductor film, which does not overlap with the gateelectrode, by implanting an ion including nitrogen into the oxidesemiconductor film through the gate insulating film; forming a wiringconnected to one of the pair of oxynitride semiconductor regions; andheating the substrate with a substrate temperature higher than or equalto 150 ° C. and lower than or equal to 600 ° C. after forming the pairof oxynitride semiconductor regions.
 9. The method for manufacturing asemiconductor device according to claim 8, wherein the ion includingnitrogen is implanted so that a nitrogen concentration of the pair ofoxynitride semiconductor regions is higher than or equal to 0.01 at. %and lower than or equal to 30 at. %.
 10. The method for manufacturing asemiconductor device according to claim 8, wherein the oxidesemiconductor film is formed so that a hydrogen concentration of thepair of oxynitride semiconductor regions is higher than or equal to 1×10¹⁹ atoms/cm³ and lower than or equal to 1×10²² atoms/cm³, and so thata hydrogen concentration of a region sandwiched between the pair ofoxynitride semiconductor regions is lower than or equal to 1×10²⁰atoms/cm³.
 11. The method for manufacturing a semiconductor deviceaccording to claim 8, wherein the oxide semiconductor film is providedto comprise two or more of In, Ga, Sn, and Zn.
 12. The method formanufacturing a semiconductor device according to claim 8, whereinoxygen is released from at least one of an insulating film having theinsulating surface and the gate insulating film by heating.
 13. Themethod for manufacturing a semiconductor device according to claim 8,further comprising the step of forming an insulating film over the gateelectrode, wherein the heating step is performed during the step offorming the insulating film.
 14. The method for manufacturing asemiconductor device according to claim 8, wherein ions includingnitrogen and hydrogen are implanted into the oxide semiconductor film inthe step of forming the pair of oxynitride semiconductor regions.
 15. Amethod for manufacturing a semiconductor device, comprising the stepsof: forming an oxide semiconductor film over an insulating surface overa substrate; forming a first insulating film covering the oxidesemiconductor film; forming a conductive film over the first insulatingfilm; forming a gate electrode and a gate insulating film from which apart of the oxide semiconductor film is exposed, by processing theconductive film and the first insulating film; forming a pair ofoxynitride semiconductor regions in the part of the exposed oxidesemiconductor film by implanting an ion including nitrogen into theoxide semiconductor film; forming a wiring connected to one of the pairof oxynitride semiconductor regions; and heating the substrate with asubstrate temperature higher than or equal to 150 ° C. and lower than orequal to 600 ° C. after forming the pair of oxynitride semiconductorregions.
 16. The method for manufacturing a semiconductor deviceaccording to claim 15, wherein the ion including nitrogen is implantedso that a nitrogen concentration of the pair of oxynitride semiconductorregions is higher than or equal to 0.01 at. % and lower than or equal to30 at. %.
 17. The method for manufacturing a semiconductor deviceaccording to claim 15, wherein the oxide semiconductor film is formed sothat a hydrogen concentration of the pair of oxynitride semiconductorregions is higher than or equal to 1 ×10¹⁹ atoms/cm³ and lower than orequal to 1×10²² atoms/cm³, and so that a hydrogen concentration of aregion sandwiched between the pair of oxynitride semiconductor regionsis lower than or equal to 1×10²⁰ atoms/cm³.
 18. The method formanufacturing a semiconductor device according to claim 15, wherein theoxide semiconductor film is provided to comprise two or more of In, Ga,Sn, and Zn.
 19. The method for manufacturing a semiconductor deviceaccording to claim 15, wherein oxygen is released from at least one of asecond insulating film having the insulating surface and the gateinsulating film by heating.
 20. The method for manufacturing asemiconductor device according to claim 15, further comprising the stepof forming an insulating film over the gate electrode, wherein theheating step is performed during the step of forming the insulatingfilm.
 21. The method for manufacturing a semiconductor device accordingto claim 15, wherein ions including nitrogen and hydrogen are implantedinto the oxide semiconductor film in the step of forming the pair ofoxynitride semiconductor regions.